Vapor deposition equipment (ALD, CVD, PECVD)

Critical processes require quick real-time feedback of different process variables. When several heating elements are involved, using external transducers to monitor the current may take significant panel space and wiring time. The NRG is a scalable solid state relay solution that works on a bus chain design. Each solid state relay and/or solid state contactor has built-in current and voltage measurement as well as other relevant parameters. All this data is exchanged in real-time with a main controller, NRGC, that is the main interface to the machine PLC. Different protocols are available including EtherCAT, EtherNet/IP, Modbus TCP/IP and Profinet. Intelligent diagnostics such as load deviation can also highlight heater deviation from a set value thereby predicting a possible heater failure. 

Proportional controllers, also known as SCRs, take away the burden of converting analog signals from thermocouples into digital (PWM) signals. An analog current (0 - 20 mA, 4 - 20 mA) or an analog voltage (0 - 10 VDC) can be fed directly to the control input of the RGC1P, RGC2P or RGC3P and the output voltage to the heater will vary proportionally. This control method results in a very fine control strategy that minimizes temperature overshoots. 
Another feature within the RGC.P family of products is the soft start function. Soft start is ideal for applications using short-wave infrared heaters (SWIR) as it reduces by >40% the initial inrush current that occurs when SWIR heaters are switched on from a cold state. 

Deposition equipment typically has a series of 1-phase heating elements. The RGC solid state contactors come in a sleek and compact design to minimize space occupancy in the electrical panel. 
The RGC series comes in two different terminal configurations, namely "E-type" which is configuration that mimics that of an electromechanical contactor and "U-type" which is also referred to as relay configuration since the load terminals are on the same side of the solid state contactor. The "U-type" is sometimes preferred as it allows a better cable distribution in the panel. 

A heater break or a thermal runaway, due to a heater failing short, are two critical issues in most thermal processes. A heater failing open will result in a temperature drop within the zone whereas a heater failing short will result in an uncontrolled heating zone which may result in significant wafer defects and high scrap costs. 
RGC1S solid state relay and contactor series integrates current monitoring to detect  heater failure. Based on a "teach" function, the RGC1S compares the measured current to the one stored during the "teach" function and checks for any current deviation for up to 6 heaters connected to the relay. 

Deposition processes may also require heating elements with relatively low power (around 500W to 750W) thereby requiring a very low switching current. RP1A series of solid state relays is designed in a very slim housing (10.5 mm) and can be directly mounted on a PCB or, with the optional accessory, can also be DIN rail mount resulting in a plug and play solution that takes minimal space.

Silicon wafer production processes consume a considerable amount of electrical energy. With an ever increasing focus on energy efficiency, energy meters are becoming increasingly integrated in semiconductor equipment to enable energy monitoring of the complete equipment. 
Our DIN-rail mount meters features both external current transformer (CT) connection as well as direct connection based inputs.  The range of DIN-rail meters is characterized by its compact dimensions and ease of use. Both single phase and three phase energy meters are available. 

The WM series of power analyzers has a modular design that allows users to select the required features by adding one or modules to the WM base unit.  WM20, WM30 and WM40 can be installed in any switchboard to control energy consumption, main electrical variables and harmonic distortion.  The plug-in modules include communication modules such as Modbus RTU, Modbus TCP/IP.

Switch  mode power supplies are a crucial part in powering up most of the critical components within the electrical panel of any semiconductor equipment.
SPDC series of DIN-rail mount power supplies offers a number of unique features such as ultra-slim design, integrated PFC and efficiencies up to 96%. 
Switch mode power supplies can work on a wide range of input voltage maintaining a very stable output DC voltage to make sure that all the critical components such as PLCs and HMIs are safely powered up.